Time |
Program Item |
Speaker |
9:00 – 9:15 |
Welcome |
|
Keynotes |
9:15 – 9:45 |
Highlights from the Current AMA Trend Study on Sensor Technology
- Presentation and evaluation of sensory concepts and current trends
- Concrete application examples such as gas sensing (including hydrogen) and the application of sensors for predictive maintenance
|
Prof. Christine Ruffert, Fraunhofer IPMS/iCampµs |
9:45 – 10:15 |
Technological Processes for M(O)EMS
- Explanation of the development cycle from design to final testing
- Silicon structuring as a core process
- Technologies (SOI, Cavity-SOI, poly-Si, piezoelectric) as well as encapsulation
- Clarification with selected application examples
|
Prof. Karla Hiller, Fraunhofer ENAS |
10:15 – 10:45 |
Break and Discussion |
|
Session Inertial & Optics |
10:45 – 11:05 |
MEMS Gyroscopes: Innovations on the Micrometer Scale
- Operating principle of a MEMS rate gyroscope
- Examples of the use of rate gyroscopes and examples of commercially available sensors
- Classification of rate gyroscopes into performance classes
- Development towards high-performance rate gyroscopes using the example of a tuning fork gyro
|
Dr. Roman Forke, Fraunhofer ENAS |
11:05 – 11:25 |
Micro-Mirror Array Spatial Light Modulators – Tailored Phase Modulation for Holography, Medical Technology, and Quantum Computing
- Introduction: What are Spatial Light Modulators (SLMs)?
- Universal properties of SLMs developed at IPMS
- Application examples & current development trends (holography, medical technology, quantum computing, …)
|
Dr. Dimitrios Kourkoulos, Fraunhofer IPMS |
11:25 – 11:45 |
MEMS Micro Scanner Mirrors – Application-Specific Beam Positioning for Medical, LIDAR, Spectroscopy, and Space
- Designs and properties of MEMS scanners (resonant, quasi-static, 2D raster, 2D vector scanners)
- Application examples & current developments (biomedicine, LIDAR, spectroscopy)
- Introduction to MEMS-on-PIC for cryptography and optical switches
|
Dr. Thilo Sandner, Fraunhofer IPMS |
11:45 – 12:05 |
MEMS in IR Sensors and Spectroscopy |
Dr. Eric Müller, Infratec GmbH |
12:05 – 13:00 |
Lunch break |
|
Session Acoustics |
13:00 – 13:20 |
Acoustics with Electrostatic MEMS: From Concept to Practical Implementation
- Overview of capacitive ultrasound transducers (CMUT)
- Explanation of the special features of CMUT technology
- Example applications in medical technology or condition monitoring
|
Dr. Sandro Koch, Fraunhofer IPMS |
13:20 – 13:40 |
Piezoelectric Micromechanical Ultrasound Transducers
- Overview of piezoelectric ultrasound transducers (PMUT)
- Properties and comparison with complementary ultrasound technologies
- Application examples & current development trends (optoacoustic imaging, elastography, …)
|
Dr. Chris Stöckel, Fraunhofer ENAS |
13:40 – 14:00 |
MEMS Instead of Piezo Ceramics? Motivation, Differences, and Challenges in Adopting a New Transducer Technology
- Ultrasonic measurement technology portfolio at SONOTEC
- Comparison of established piezoceramic technology versus MEMS: Motivation and outlook
- Concrete requirements and challenges based on examples (air-coupled ultrasonic testing, vibration sensors for VIH)
|
Martin Fuchs, SONOTEC GmbH |
Interactive Exchange |
14:00 – 14:30 |
Interactive Break with Demonstrators and Posters |
|
14:30 – 15:30 |
World Cafe |
|
15:30 – 15:45 |
Break |
|
15:45 – 16:30 |
Summary and Final Discussion |
|